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    Add as FriendAutomotive Sensors : Mems

    by: Rogers

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    1 : Chris Mosser Automotive Sensors: MEMS
    2 : Outline Introduce MEMS Applications Automotive Specific Information Fabrication Packaging
    3 : Micro(small) Electro(electric components/functionality) Mechanical(mechanical components/functionality) Systems(integrated, system-like functionality) What are MEMS?
    4 : Where do you find MEMs? Printers High DPI inkjets Projectors Micro-Mirrors from Texas Instruments Cell Phones Knowles Microphones used in most new cell phones Automobiles
    6 : Why MEMS Low cost, High yield Use existing IC fabrication technology Made primarily on Silicon Wafers
    7 : Why MEMS Favorable scaling for a lot of applications Flow-rate sensors Electrostatics Magnetism Many others Not all applications Solar Power Turbulent Boundary Energy Harvesting
    8 : Typical Applications Accelerometers Magnetometers Microphones Micro-Fluidics RF-MEMS Bridge to Nanotechnology
    9 : Automotive MEMS MEMS Sensors and Actuators used to control various elements of the automobile Powertrain and Chassis control Ex: Manifold Air Temperature Comfort and Convenience Ex: Air-Temperature Control Communications Ex: Wireless
    11 : Who Developed It Two groups Delco Electronics Group(General Motors) Used piezoresistive sensing Ford Used capacitive sensing
    13 : Capacitive Sensors Vary two parameters Gap Overlap area Advantages Low power High accuracy Temperature independent Important for a lot of automobile applications Reciprocal Disadvantages Parasitic capacitance Small signal
    14 : What about Actuators? Traditionally only sensors were developed for automobiles Actuators started to become popular as MEMs development costs decreased Popular actuators include Microphones Fuel injection nozzles
    15 : Fabrication Use basic IC fabrication Masks/layers/CVD/oxidation/etc MEMS specific fabrication DRIE (Deep reactive ion etch) SOI (silicon on insulator)
    16 : General MEMS Packaging The most important and expensive part of a MEMS sensor/actuator ~45% of the cost of designing a MEMS device is spent on packaging Often times packaging constraints will prevent a design from being produced May require too complex of a package design for realistic implementation Package can greatly change the response of a device Sensitivity/Dynamic Range/etc all effected by package
    17 : Automotive MEMS Packaging Automotive sensors generally only allowed to have 3 wires connected to them Minimizes cost Environment concerns are especially important in automotive applications Engine heat High acceleration/deceleration Humidity
    18 : Automotive MEMS Summary Precision Engineering  By V. C. Venkatesh, Sudin Izman
    19 : Thank You
    20 : References Application of MEMS Technology in Automotive Sensors and Actuators, David Eddy and Douglas Spanks

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