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Slide 1 :
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MICRO ELECTRO MECHANICAL SYSTEM (MEMS) Presented by
Bikram Choudhury
Department of Electrical and Electronics Engineering (1st year)
Vignan Institute of Technology and Management (VITAM)
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Slide 2 :
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Outline Introduction
MEMS VS. IC’s
Applications
NEMS ( Nano Electro Mechanical Systems)
Cantilever |
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Slide 3 :
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What is MEMS ? MEMS Micro-electromechanical systems
It refers as MST ( Microsystems Technology ) in Europe and Micro machines in Japan.
They are formed by integration of electronic and mechanical components at micron level. Silicon chip Schematic illustration of
MEMS components. MEMS = Mechanical (Microstructures + Micro
sensors + Microactuators +Microelectronics) |
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Classification of MEMS MEMS = MST
MOEMS MST
MEMS = Optics U Electronics U Mechanics
Extremely difficult to categories MEMS devices in terms of their subset of MST. Classifications of MEMS (OR)
Microsystems technology U |
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MEMS vs. Integrated Circuits (IC’s) MEMS IC’S Move and sense mass
Use Semiconductor , Bulk, LIGA processing technologies
Packaging includes Electrical signals, Optical connections, Fluidic capillaries, gas channels and openings to the environment. Move and sense electrons
Use Semiconductor processing technologies
Packaging consists of electrical connections in and out of a sealed environment |
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APPLICATIONS 1) Telecommunication 7) Cantilever
2) Healthcare 8) Biomedical
3) Automotive 9) Biotechnology
4) Sensors 10) Micro Needles
5) NEMS ( Nano Electro mechanical System )
6) MOEMs (Micro Optical Electro Mechanical Systems) |
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Telecommunications: Micro relays for line card
Complex multi frequency tunable systems for wireless communications.
MEMS offer future satellite systems which can realize electrical and mechanical functions and power consumption during traditional “macro” systems. |
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Healthcare and Automotive : Healthcare:
Micro fabricated silicon pressure sensors for blood pressure monitoring
Respirators and Kidney dialysis equipment
Automotive:
Used to sense and control a car’s relationship to its environment . |
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SENSORS A sensor is a device that measures information from a surrounding environment and provides an electrical output signal in response to the parameter it measured. |
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Today, high volume MEMS can be found in a diversity of applications across multiple
Markets . |
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How MEMS work? The sensors gather information by measuring mechanical, thermal, biological, chemical, magnetic and optical signals from the environment.
The microelectronic ICs act as the decision making piece of the system, by processing the information given by the sensors.
Finally, the actuators help the system respond by moving, pumping, filtering or somehow controlling the surrounding environment to achieve its purpose. |
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NEMS (Nano Electro Mechanical Systems) Nanotechnology Meets MEMS
A. Detection of a single E.coli Cell
B. Detection of Single DNA
C. Cantilever sensors
D. Mass Storage - IBM
E. Mass Storage – Nano chip |
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Cantilever A cantilever is supported at one end (fixed).
It has a length, thickness and width (geometry)
When a force is applied to the end, it deflects
Used as a Sensors & Switches
The principles of Cantilevers used in MEMS Sensors. |
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Cantilevers as Sensors Cantilevers can react to the environment in two ways:
1. The resonance frequency can shift.
(due to a change in loading mass) 2. The deflection can shift. (due to stress) |
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Concepts of Cantilevers as Sensors 1. Response to Stress
2.Response to mass |
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Response to Stress Use a laminate cantilever of dissimilar materials.
Can expands or contracts at a different rate due to absorption, adsorption, heat
Resulting stress gradient causes the cantilever to bend. |
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Response to Mass Cantilevers are coated with a material which is selective to what can adhere to it.
When the target material adheres to the cantilever, its mass changes resulting in a shift of the cantilevers resonance frequency. |
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Advantages They have several substantive advantages:
Orders of magnitude smaller size
Better performance than other solutions
Possibilities for batch fabrication
Cost-effective integration with electronics
Potentially large reduction in power consumption |
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Conclusion MEMS technology has already taken root firmly in today’s world.
It is destined to become a hallmark 21st-century manufacturing technology with numerous and diverse applications.
MEMS will have a dramatic impact on everything from aerospace technology to biotechnology. |
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Cont…. MEMS is forecasted to have a commercial and defense market growth similar to its parent IC technology.
Designing various MEMS models i.e sensors, transducers, accelerometer, Actuators, etc by COMSOL- Multiphysics software are in progress. |
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